Full Description

This document specifies methods for characterizing and calibrating the scan axes of scanning-probemicroscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to thoseproviding further calibrations and is not intended for general industry use, where a lower level of calibration might be required.

This document has the following objectives:
to increase the comparability of measurements of geometrical quantities made using SPMs bytraceability to the unit of length;
to define the minimum requirements for the calibration process and the conditions of acceptance;
to ascertain the instrument's ability to be calibrated (assignment of a "calibrate-ability" category tothe instrument);
to define the scope of the calibration (conditions of measurement and environments, ranges ofmeasurement, temporal stability, transferability);
to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simplegeometrical quantities in measurements using an SPM;
to define the requirements for reporting results.

Cross References:
ISO/IEC Guide 98-3
ISO 11039
IEC/TS 62622
ISO 18115-2
ISO 5436-1
ISO 12179
ISO 4288
ISO Guide 34
ISO Guide 30
ISO 12853
ISO 4287
ISO 3274


All current amendments available at time of purchase are included with the purchase of this document.

Product Details

Published: 05/31/2019 ISBN(s): 9780580882968 Number of Pages: 70 File Size: 1 file , 8.5 MB Product Code(s): 30314300, 30314300, 30314300 Note: This product is unavailable in United Kingdom