BS IEC 62047-34:2019

BS IEC 62047-34:2019 Semiconductor devices. Micro-electromechanical devices. Test methods for MEMS piezoresistive pressure-sensitive device on wafer

standard by British Standard / International Electrotechnical Commission, 04/16/2019

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BS IEC 62047-34:2019 describes test conditions and test methods of electric character, staticperformances and thermal performances for MEMS pressure-sensitive devices. Thisdocument applies to test for both open and closed loop piezoresistive MEMS pressuredevices on wafer.

Cross References:
IEC 60747-14-3
IEC 61193-2
ISO/IEC Guide 98-3


All current amendments available at time of purchase are included with the purchase of this document.

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